HBO > 200W for ASML

Product features and benefits
  • High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
  • Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
  • Designed for long lasting performance
  • Qualified with ASML
Areas of application
  • Semiconductor

Information about Family

OSRAM HBO lamps > 200W are designed to meet the high demands of the Semiconductor industry. With peak intensity at 365nm these lamps are ideal for microlithography and are designed and qualified for specific equipment manufacturers.

Products

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Product
Product Number
Nominal Wattage
Nominal Voltage
Current (A)
Average Rated Life
Data sheet
HBO 500W/60V/A 10/CS 1/SKU
69205 500 W 60 V 8.3 A 800 h
HBO 500W/48.5V/B 10/CS 1/SKU
69206 500 W 48.5 V 10.3 A 800 h
HBO 1003 W/PIL
1003 W 27.1 V 25.8 A 1500 h
HBO 1500W/PIL 6/CS 1/SKU
69181 1500 W 23 V 65.2 A 1500 h
HBO 2100W/PIL 1/CS 1/SKU
69501 2100 W 24 V 87.5 A 1500 h
HBO 5500W/PIL 1/CS 1/SKU
69521 5500 W 27 V 200 A 1500 h

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