HBO 1500W/PIL 6/CS 1/SKU
Product features and benefits
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
- Designed for long lasting performance
- Qualified with ASML
Areas of application
- Semiconductor
Technical Data
General product information
Product Number
69181
Product Name
HBO 1500W/PIL 6/CS 1/SKU
Family Brand Name
HBO
General Description
1,500 watt, mercury short arc, double-ended lamp for semiconductor
applications in ASML PAS2500/22, PAS5500/100C,/100D stepper(s)
Application
Semiconductor
Product Remark
- Anode Base with cooling fins and cable connection.
Electrical data
Nominal Wattage
1500 W
Nominal Voltage
23 V
Current (A)
65.2 A
Type of Current
DC
Light technical data
Radiant intensity 365 ± 2.5nm (mW/sr)
4850
Light Center Length - LCL (mm)
118 mm
Average Rated Life
1500 h
Physical attributes
Base Anode
SFc30-6/25
Base Cathode
SFc27-10/35
Bulb Shape
T
Maximum Overall Length (mm)
273 mm
Length l1 (mm)
273 mm
Length l1 max. (mm)
273 mm
Diameter d (in)
1.811 in
Diameter d (mm)
46.00 mm
Distance a (mm)
118 mm
Electrode Gap - cold (mm)
4 mm
Additional product data
Operating Position
Vertical, anode down
Maximum Base Temperature (ºC)
200 C
Cooling
Forced Base
Lamp Type
DOUBLE ENDED
Packaging information
Product number |
EAN/UPC |
Packaging |
Quantity |
Outside dimensions l x w x h |
Gross weight |
|---|---|---|---|---|---|
| 69181 | 4050300461465 | Tube | 1 | 15.2in x 7.7in x 6.3in | 2.8lb |
| 69181 | 4050300461472 | Shipping box | 6 | 20.1in x 16.5in x 16.5in | 19lb |