HBO Mercury Short Arc Lamps (>200W)

HBO > 200W for ASML
Areas of application
  • Semiconductor

HBO > 200W for ASML

Product family features
  • High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
  • Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
  • Designed for long lasting performance
  • Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss

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HBO > 200W for Canon
Areas of application
  • Semiconductor

HBO > 200W for Canon

Product family features
  • High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
  • Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
  • Designed for long lasting performance
  • Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss

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HBO > 200W for Nikon
Areas of application
  • Semiconductor

HBO > 200W for Nikon

Product family features
  • High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
  • Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
  • Designed for long lasting performance
  • Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss

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HBO > 200W for Süss
Areas of application
  • Semiconductor

HBO > 200W for Süss

Product family features
  • High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
  • Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
  • Designed for long lasting performance
  • Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss

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HBO > 200W for TEL
Areas of application
  • Semiconductor

HBO > 200W for TEL

Product family features
  • High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
  • Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
  • Designed for long lasting performance
  • Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss

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HBO > 200W for Other Equipment
Areas of application
  • Semiconductor

HBO > 200W for Other Equipment

Product family features
  • High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
  • Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
  • Designed for long lasting performance
  • Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss

Reduce Read more